Inventor
LEWKEBANDARA T SUREN
US6 patents
Patents
6 patentsUS5425966AJun 20, 1995
Process for coating with single source precursors
UNIV WAYNE STATE65 citations95
US5591483AJan 7, 1997
Process for the preparation of metal nitride coatings from single source precursors
UNIV WAYNE STATE25 citations92
US5409735AApr 25, 1995
Chemical vapor deposition of metal pnictogenide films using single source precursors
UNIV WAYNE STATE20 citations90
US5900498AMay 4, 1999
Process for the preparation of metal nitride coatings from single source precursors and precursors suitable therefor
UNIV WAYNE STATE12 citations73
US5298295AMar 29, 1994
Chemical vapor deposition of metal chalcogenide films
UNIV WAYNE STATE7 citations72
US5112650AMay 12, 1992
Chemical vapor deposition of metal chalcogenide films
UNIV WAYNE STATE10 citations72