Inventor
SUDA KYO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “SUDA KYO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
4 patentsUS4731855AMar 15, 1988
Pattern defect inspection apparatus
HITACHI LTD74 citations94
US4685802AAug 11, 1987
Small particle detection system
HITACHI LTD32 citations92
US4464011AAug 7, 1984
Light beam scanning apparatus and the method
HITACHI LTD6 citations60
US4072767AFeb 7, 1978
Method for controlling chemical vapor deposition
HITACHI LTD6 citations60