Inventor
LANE ANDREW P
US3 patents
⚠️ This page may combine multiple inventors who share the name “LANE ANDREW P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
2 patentsUS4894352AJan 16, 1990
Deposition of silicon-containing films using organosilicon compounds and nitrogen trifluoride
TEXAS INSTRUMENTS INC330 citations94
US5401692AMar 28, 1995
Method for minimizing particle generation on a wafer surface during high pressure oxidation of silicon
TEXAS INSTRUMENTS INC4 citations51