Inventor
TAYLOR W N NICK
US4 patents
Patents
4 patentsUS6635115B1Oct 21, 2003
Tandem process chamber
APPLIED MATERIALS INC500 citations98
US6152070ANov 28, 2000
Tandem process chamber
APPLIED MATERIALS INC455 citations98
US5855681AJan 5, 1999
Ultra high throughput wafer vacuum processing system
APPLIED MATERIALS INC1,143 citations98
US7655092B2Feb 2, 2010
Tandem process chamber
APPLIED MATERIALS INC27 citations91