Inventor
SCHNEIDER RONALD M
NL3 patents
Patents
3 patentsUS6597429B2Jul 22, 2003
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV20 citations86
US6774374B1Aug 10, 2004
Isolation mounts for use with vacuum chambers and their application in lithographic projection apparatuses
ASML NETHERLANDS BV17 citations79
US6747731B2Jun 8, 2004
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV1 citations45