Inventor
MA YEMING JIM
US5 patents
Patents
5 patentsUS6593247B1Jul 15, 2003
Method of depositing low k films using an oxidizing plasma
APPLIED MATERIALS INC129 citations99
US6709715B1Mar 23, 2004
Plasma enhanced chemical vapor deposition of copolymer of parylene N and comonomers with various double bonds
APPLIED MATERIALS INC109 citations97
US6086952AJul 11, 2000
Chemical vapor deposition of a copolymer of p-xylylene and a multivinyl silicon/oxygen comonomer
APPLIED MATERIALS INC93 citations97
US7160821B2Jan 9, 2007
Method of depositing low k films
APPLIED MATERIALS INC25 citations92
US6806207B2Oct 19, 2004
Method of depositing low K films
APPLIED MATERIALS INC34 citations92