Inventor
SEN SOOVO
US5 patents
⚠️ This page may combine multiple inventors who share the name “SEN SOOVO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS6946033B2Sep 20, 2005
Heated gas distribution plate for a processing chamber
APPLIED MATERIALS INC227 citations98
US7024105B2Apr 4, 2006
Substrate heater assembly
APPLIED MATERIALS INC56 citations94
US7008484B2Mar 7, 2006
Method and apparatus for deposition of low dielectric constant materials
APPLIED MATERIALS INC19 citations92
US7628863B2Dec 8, 2009
Heated gas box for PECVD applications
APPLIED MATERIALS INC20 citations90