Inventor
CARSWELL ANDREW
US7 patents
⚠️ This page may combine multiple inventors who share the name “CARSWELL ANDREW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
5 patentsUS7967661B2Jun 28, 2011
Systems and pads for planarizing microelectronic workpieces and associated methods of use and manufacture
MICRON TECHNOLOGY INC9 citations82
US7628680B2Dec 8, 2009
Method and apparatus for removing material from microfeature workpieces
MICRON TECHNOLOGY INC3 citations61
US7294049B2Nov 13, 2007
Method and apparatus for removing material from microfeature workpieces
MICRON TECHNOLOGY INC3 citations61
US7452816B2Nov 18, 2008
Semiconductor processing method and chemical mechanical polishing methods
MICRON TECHNOLOGY INC2 citations60
US9401285B2Jul 26, 2016
Chemical mechanical planarization topography control via implant
MICRON TECHNOLOGY INC0 citations42