Inventor

DAO HUUTRI

US2 patents

⚠️ This page may combine multiple inventors who share the name “DAO HUUTRI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PAMARTHY SHARMA

1 patent

US8475625B2Jul 2, 2013

Apparatus for etching high aspect ratio features

PAMARTHY SHARMA15 citations73

APPLIED MATERIALS INC

1 patent

US9155184B2Oct 6, 2015

Plasma generation source employing dielectric conduit assemblies having removable interfaces and related assemblies and methods

APPLIED MATERIALS INC2 citations54