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Inventor
NISHIDA TAKUMASA
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “NISHIDA TAKUMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NISHIDA TAKUMASA
2 patents
US8216421B2
Jul 10, 2012
Plasma stabilization method and plasma apparatus
NISHIDA TAKUMASA
8 citations
79
US8691048B2
Apr 8, 2014
Plasma stabilization method and plasma apparatus
NISHIDA TAKUMASA
2 citations
58
LAM RES CORP
2 patents
US7320941B2
Jan 22, 2008
Plasma stabilization method and plasma apparatus
LAM RES CORP
7 citations
71
US9824863B2
Nov 21, 2017
Plasma stabilization method and plasma apparatus
LAM RES CORP
0 citations
49