Inventor
BUROV ANATOLY
US5 patents
Patents
5 patentsUS11966156B2Apr 23, 2024
Lithography mask repair by simulation of photoresist thickness evolution
KLA CORP3 citations69
US12406197B2Sep 2, 2025
Prediction and metrology of stochastic photoresist thickness defects
KLA CORP0 citations58
US12579631B2Mar 17, 2026
Method to calibrate, predict, and control stochastic defects in EUV lithography
KLA CORP0 citations57
US12561790B2Feb 24, 2026
Method to calibrate, predict, and control stochastic defects in EUV lithography
KLA CORP0 citations57
US12561791B2Feb 24, 2026
Method to calibrate, predict, and control stochastic defects in EUV lithography
KLA CORP0 citations57