Inventor
KO KYEONGEUN
KR3 patents
Patents
3 patentsUS12579631B2Mar 17, 2026
Method to calibrate, predict, and control stochastic defects in EUV lithography
KLA CORP0 citations57
US12561790B2Feb 24, 2026
Method to calibrate, predict, and control stochastic defects in EUV lithography
KLA CORP0 citations57
US12561791B2Feb 24, 2026
Method to calibrate, predict, and control stochastic defects in EUV lithography
KLA CORP0 citations57