Inventor

BAKARIAN SERGEI G

US4 patents

⚠️ This page may combine multiple inventors who share the name “BAKARIAN SERGEI G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA CORP

3 patents

US12579631B2Mar 17, 2026

KLA TENCOR CORP

1 patent

US9400865B2Jul 26, 2016

Extracting comprehensive design guidance for in-line process control tools and methods

KLA TENCOR CORP2 citations57

BAKARIAN SERGEI G

KLA CORP

Method to calibrate, predict, and control stochastic defects in EUV lithography

Method to calibrate, predict, and control stochastic defects in EUV lithography

Method to calibrate, predict, and control stochastic defects in EUV lithography

KLA TENCOR CORP

Extracting comprehensive design guidance for in-line process control tools and methods