Inventor
DHAYALAN ARUN
US4 patents
Patents
4 patentsUS11540432B2Dec 27, 2022
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
APPLIED MATERIALS INC1 citations70
US12564012B2Feb 24, 2026
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
APPLIED MATERIALS INC0 citations59
US12004337B2Jun 4, 2024
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
APPLIED MATERIALS INC0 citations59
US11547030B2Jan 3, 2023
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
APPLIED MATERIALS INC0 citations59