Inventor
WATANABE TOMOHIDE
7 patents
⚠️ This page may combine multiple inventors who share the name “WATANABE TOMOHIDE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
5 patentsUS5379348AJan 3, 1995
Pattern defects inspection system
TOSHIBA KK22 citations92
US5602645AFeb 11, 1997
Pattern evaluation apparatus and a method of pattern evaluation
TOSHIBA KK12 citations72
US4743768AMay 10, 1988
Method and apparatus for measuring non-linearity of a pattern edge
TOSHIBA KK12 citations71
US7394048B2Jul 1, 2008
Focusing device, focusing method and a pattern inspecting apparatus
TOSHIBA KK2 citations62
US8358340B2Jan 22, 2013
Pattern inspection device and method of inspecting pattern
TOSHIBA KK0 citations40