Inventor
SENTURIA STEPHEN D
US33 patents
⚠️ This page may combine multiple inventors who share the name “SENTURIA STEPHEN D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MASSACHUSETTS INST TECHNOLOGY
25 patentsUS5043043AAug 27, 1991
Method for fabricating side drive electrostatic micromotor
MASSACHUSETTS INST TECHNOLOGY141 citations98
US4943750AJul 24, 1990
Electrostatic micromotor
MASSACHUSETTS INST TECHNOLOGY146 citations98
US6329738B1Dec 11, 2001
Precision electrostatic actuation and positioning
MASSACHUSETTS INST TECHNOLOGY143 citations97
US5106461AApr 21, 1992
High-density, multi-level interconnects, flex circuits, and tape for tab
MASSACHUSETTS INST TECHNOLOGY480 citations97
US6392313B1May 21, 2002
Microturbomachinery
MASSACHUSETTS INST TECHNOLOGY207 citations96
US5932940AAug 3, 1999
Microturbomachinery
MASSACHUSETTS INST TECHNOLOGY287 citations96
US4997521AMar 5, 1991
Electrostatic micromotor
MASSACHUSETTS INST TECHNOLOGY97 citations96
US4899581AFeb 13, 1990
Method and apparatus for the quantitative measurement of adhesion of thin films
MASSACHUSETTS INST TECHNOLOGY61 citations96
US4823607AApr 25, 1989
Released film structures and method of measuring film properties
MASSACHUSETTS INST TECHNOLOGY56 citations96
US4423371ADec 27, 1983
Methods and apparatus for microdielectrometry
MASSACHUSETTS INST TECHNOLOGY119 citations96
US4158807AJun 19, 1979
Gapped gate charge-flow transistor with a thin film sensor having two modes of conduction within the gapped gate used to sense a property of the ambient environment
MASSACHUSETTS INST TECHNOLOGY56 citations96
US5955659ASep 21, 1999
Electrostatically-actuated structures for fluid property measurements and related methods
MASSACHUSETTS INST TECHNOLOGY81 citations95
US4942767AJul 24, 1990
Pressure transducer apparatus
MASSACHUSETTS INST TECHNOLOGY59 citations95
US4926696AMay 22, 1990
Optical micropressure transducer
MASSACHUSETTS INST TECHNOLOGY80 citations95
US4896098AJan 23, 1990
Turbulent shear force microsensor
MASSACHUSETTS INST TECHNOLOGY99 citations95
US4980034ADec 25, 1990
High-density, multi-level interconnects, flex circuits, and tape for TAB
MASSACHUSETTS INST TECHNOLOGY122 citations94
US6664706B1Dec 16, 2003
Electrostatically-controllable diffraction grating
MASSACHUSETTS INST TECHNOLOGY25 citations91
US4352059ASep 28, 1982
Determination of moisture level in materials
MASSACHUSETTS INST TECHNOLOGY30 citations90
US4908509AMar 13, 1990
Traction and reaction force microsensor
MASSACHUSETTS INST TECHNOLOGY18 citations82
US4236121ANov 25, 1980
Oscillators including charge-flow transistor logic elements
MASSACHUSETTS INST TECHNOLOGY24 citations82
US4368480AJan 11, 1983
Multiplexing of chemically responsive FETs
MASSACHUSETTS INST TECHNOLOGY15 citations74
US4209796AJun 24, 1980
Charge-flow transistors having metallization patterns
MASSACHUSETTS INST TECHNOLOGY7 citations74
US6724125B2Apr 20, 2004
Methods and apparatus for diffractive optical processing using an actuatable structure
MASSACHUSETTS INST TECHNOLOGY11 citations72
US4317084AFeb 23, 1982
Oscillator that includes a charge-flow transistor
MASSACHUSETTS INST TECHNOLOGY9 citations69
US4316140AFeb 16, 1982
Charge-flow transistors
MASSACHUSETTS INST TECHNOLOGY2 citations63