Inventor
TOMITA YOSHIYUKI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “TOMITA YOSHIYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO HEAVY INDUSTRIES
12 patentsUS6668202B2Dec 23, 2003
Position control system and velocity control system for stage driving mechanism
SUMITOMO HEAVY INDUSTRIES26 citations92
US6584367B1Jun 24, 2003
Stage position control method and stage position control apparatus capable of improving positioning precision
SUMITOMO HEAVY INDUSTRIES36 citations92
US6564110B1May 13, 2003
Position controlling apparatus capable of reducing the effect of disturbance
SUMITOMO HEAVY INDUSTRIES36 citations92
US7257902B2Aug 21, 2007
Stage device
SUMITOMO HEAVY INDUSTRIES46 citations91
US6817104B2Nov 16, 2004
X-Y stage apparatus
SUMITOMO HEAVY INDUSTRIES26 citations89
US7082674B2Aug 1, 2006
Method for winding a single coil of a coil unit for a linear motor
SUMITOMO HEAVY INDUSTRIES11 citations82
US5056030AOct 8, 1991
Apparatus for carrying out decoupling control of a t-die
SUMITOMO HEAVY INDUSTRIES16 citations73
US6925355B2Aug 2, 2005
Substrate transfer device
SUMITOMO HEAVY INDUSTRIES8 citations71
US6644584B2Nov 11, 2003
Single coil of coil unit for linear motor, method and device for winding and forming the same, and method for forming and fabricating coil unit
SUMITOMO HEAVY INDUSTRIES4 citations61
US7502127B2Mar 10, 2009
Sensor device and stage device
SUMITOMO HEAVY INDUSTRIES4 citations60
US7239939B2Jul 3, 2007
Substrate transfer device
SUMITOMO HEAVY INDUSTRIES3 citations60
US6965115B2Nov 15, 2005
Airtight processing apparatus, airtight processing method, and electron beam processing apparatus
SUMITOMO HEAVY INDUSTRIES0 citations42