Inventor
GOBETZ FRANK W
US5 patents
Patents
5 patentsUS5381299AJan 10, 1995
Capacitive pressure sensor having a substrate with a curved mesa
UNITED TECHNOLOGIES CORP65 citations93
US5448444ASep 5, 1995
Capacitive pressure sensor having a reduced area dielectric spacer
UNITED TECHNOLOGIES CORP29 citations89
US5444901AAug 29, 1995
Method of manufacturing silicon pressure sensor having dual elements simultaneously mounted
UNITED TECHNOLOGIES CORP23 citations88
US4080525AMar 21, 1978
Laser welding apparatus for pipe
UNITED TECHNOLOGIES CORP26 citations79
US5440931AAug 15, 1995
Reference element for high accuracy silicon capacitive pressure sensor
UNITED TECHNOLOGIES CORP11 citations72