Inventor
MASUYUKI TAKASHI
JP4 patents
Patents
4 patentsUS6137562AOct 24, 2000
Substrate adjuster, substrate holder and substrate holding method
NIKON CORP82 citations92
US5473435ADec 5, 1995
Method of measuring the bent shape of a movable mirror of an exposure apparatus
NIKON CORP25 citations92
US5638179AJun 10, 1997
Method for measuring amount of bend of moving mirror
NIKON CORP12 citations70
US6545284B1Apr 8, 2003
Face position detection method and apparatus, and exposure method and exposure apparatus, a production method for an exposure apparatus and a production method for a semiconductor device
NIKON CORP6 citations59