Inventor
MANO MICHIO
JP7 patents
Patents
7 patentsUS6388386B1May 14, 2002
Process of crystallizing semiconductor thin film and laser irradiation
SONY CORP140 citations98
US6734635B2May 11, 2004
Process of crystallizing semiconductor thin film and laser irradiation system
SONY CORP88 citations97
US6693258B2Feb 17, 2004
Process for producing thin film semiconductor device and laser irradiation apparatus
SONY CORP95 citations97
US6632711B2Oct 14, 2003
Process for producing thin film semiconductor device and laser irradiation apparatus
SONY CORP60 citations95
US6482722B2Nov 19, 2002
Process of crystallizing semiconductor thin film and laser irradiation system
SONY CORP65 citations95
US5814886ASep 29, 1998
Semiconductor device having local connections formed by conductive plugs and method of making the same
SONY CORP20 citations91
US5880020AMar 9, 1999
Method of making a semiconductor device having local connections formed by conductive plugs
SONY CORP8 citations72