Inventor
MIWA YOSHINORI
JP17 patents
Patents
17 patentsUS6829038B2Dec 7, 2004
Exposure apparatus and exposure method
CANON KK18 citations92
US6522384B2Feb 18, 2003
Exposure method and apparatus, and device manufacturing method
CANON KK17 citations92
US6829034B2Dec 7, 2004
Exposure apparatus and device manufacturing method
CANON KK16 citations84
US6259509B1Jul 10, 2001
Exposure apparatus and device manufacturing method
CANON KK18 citations83
US7265812B2Sep 4, 2007
Cooling apparatus
CANON KK5 citations73
US6590631B2Jul 8, 2003
Exposure apparatus and device manufacturing method using the same
CANON KK5 citations73
US6552774B2Apr 22, 2003
Exposure apparatus
CANON KK8 citations73
US6493066B1Dec 10, 2002
Exposure apparatus
CANON KK9 citations73
US7145632B2Dec 5, 2006
Cooling apparatus
CANON KK3 citations62
US6982841B2Jan 3, 2006
Mirror holding mechanism in exposure apparatus, and device manufacturing method
CANON KK5 citations62
US7586582B2Sep 8, 2009
Exposure apparatus
CANON KK2 citations61
US6278516B1Aug 21, 2001
Projection exposure apparatus and method of producing a device using a projection exposure apparatus
CANON KK5 citations54
US7095480B2Aug 22, 2006
Cooling apparatus
CANON KK0 citations52
US7009684B2Mar 7, 2006
Exposure apparatus and exposure method
CANON KK0 citations51
US6791662B2Sep 14, 2004
Exposure method and apparatus, and device manufacturing method
CANON KK0 citations51
US6762822B2Jul 13, 2004
Exposure apparatus and manufacturing method using the same
CANON KK0 citations51
US7435984B2Oct 14, 2008
Imaging optical system and exposure apparatus
CANON KK0 citations50