Inventor
USUI YOICHI
JP5 patents
Patents
5 patentsUS9746762B2Aug 29, 2017
Conductive film coated substrate, multilayer reflective film coated substrate, reflective mask blank, reflective mask, and semiconductor device manufacturing method
HOYA CORP8 citations81
US7348105B2Mar 25, 2008
Reflective maskblanks
HOYA CORP12 citations81
US10527927B2Jan 7, 2020
Conductive film coated substrate, multilayer reflective film coated substrate, reflective mask blank, reflective mask, and semiconductor device manufacturing method
HOYA CORP0 citations49
US10209614B2Feb 19, 2019
Conductive film coated substrate, multilayer reflective film coated substrate, reflective mask blank, reflective mask, and semiconductor device manufacturing method
HOYA CORP0 citations49
US7722998B2May 25, 2010
Reflective mask blank
HOYA CORP0 citations49