Inventor · disambiguated record
Donald N. Polner
Also filed as: POLNER DONALD · POLNER DONALD N
5 granted patents·2 pending applications·67 citations·filing 1999–2010
79Inventor score
Top patents by PatentIndex Score
7 records- 0187US8225527B2Cooling apparatus for a web deposition systemSFERLAZZO PIERO·Filed 2010·Granted Jul 24, 2012·5 cites·8 claims
- 0273US8168941B2Ion beam angle calibration and emittance measurement system for ribbon beamsFARLEY MARVIN·Filed 2009·Granted May 1, 2012·5 cites·16 claims
- 0371US7321299B2Workpiece handling alignment systemAXCELIS TECH INC·Filed 2005·Granted Jan 22, 2008·5 cites·29 claims
- 0471US6207964B1Continuously variable aperture for high-energy ion implanterAXCELIS TECH INC·Filed 1999·Granted Mar 27, 2001·48 cites·20 claims
- 0560US8500382B2Airflow management for particle abatement in semiconductor manufacturing equipmentCASTANTINI JAMES S·Filed 2007·Granted Aug 6, 2013·4 cites·25 claims
- 0635US2004100110A1Ceramic end effector for micro circuit manufacturingAXCELIS TECH INC·Filed 2002·Application pending·0 cites
- 0735US2005110292A1Ceramic end effector for micro circuit manufacturingAXCELIS TECH INC·Filed 2004·Application pending·0 cites
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