Inventor

YOON GI-SUNG

KR5 patents

⚠️ This page may combine multiple inventors who share the name “YOON GI-SUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

4 patents

US7432022B2Oct 7, 2008

Photo mask capable of improving resolution by utilizing polarization of light and method of manufacturing the same

SAMSUNG ELECTRONICS CO LTD4 citations58

US7897299B2Mar 1, 2011

YU SANG-YONG

1 patent

US8304173B2Nov 6, 2012

Photomasks, methods of exposing a substrate to light, methods of forming a pattern, and methods of manufacturing a semiconductor device

YU SANG-YONG0 citations26

YOON GI-SUNG

SAMSUNG ELECTRONICS CO LTD

Photo mask capable of improving resolution by utilizing polarization of light and method of manufacturing the same

Phase-shift mask and method of forming the same

Method of manufacturing rim type of photomask and photomask made by such method

Method of fabricating chrome-less phase shift mask

YU SANG-YONG

Photomasks, methods of exposing a substrate to light, methods of forming a pattern, and methods of manufacturing a semiconductor device