Inventor
ITOH NORIHIRO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “ITOH NORIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS12202016B2Jan 21, 2025
Substrate cleaning apparatus, substrate cleaning method, and non-transitory computer-readable recording medium
TOKYO ELECTRON LTD0 citations61
US11826794B2Nov 28, 2023
Substrate cleaning apparatus, substrate cleaning method, and non-transitory computer-readable recording medium
TOKYO ELECTRON LTD0 citations61
US9245737B2Jan 26, 2016
Liquid treatment apparatus and liquid treatment method
TOKYO ELECTRON LTD2 citations60
US9105671B2Aug 11, 2015
Liquid processing apparatus and liquid processing method
TOKYO ELECTRON LTD3 citations60
US8865483B2Oct 21, 2014
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations41
HIGASHIJIMA JIRO
3 patentsITOH NORIHIRO
3 patentsUS8444772B2May 21, 2013
Liquid processing apparatus
ITOH NORIHIRO2 citations58
US9064908B2Jun 23, 2015
Substrate liquid processing apparatus, liquid processing method, and storage medium
ITOH NORIHIRO0 citations37
US8246759B2Aug 21, 2012
Substrate processing apparatus, substrate processing method, and program storage medium
ITOH NORIHIRO0 citations37