Inventor
LANDAU RICHARD F
US8 patents
⚠️ This page may combine multiple inventors who share the name “LANDAU RICHARD F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
OERLIKON BUEHRLE INC
4 patentsUS4622122ANov 11, 1986
Planar magnetron cathode target assembly
OERLIKON BUEHRLE INC27 citations91
US4595452AJun 17, 1986
Method and apparatus for plasma etching
OERLIKON BUEHRLE INC28 citations89
US4592800AJun 3, 1986
Method of inhibiting corrosion after aluminum etching
OERLIKON BUEHRLE INC26 citations89
US4857160AAug 15, 1989
High vacuum processing system and method
OERLIKON BUEHRLE INC53 citations86