Inventor
LIN JENG-CHI
TW6 patents
Patents
6 patentsUS12131944B2Oct 29, 2024
Slurry composition, semiconductor structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12568786B2Mar 3, 2026
Processing tool and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12362201B2Jul 15, 2025
Bevel edge removal methods, tools, and systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11664213B2May 30, 2023
Bevel edge removal methods, tools, and systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12581915B2Mar 17, 2026
Apparatus and methods for chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US12347735B2Jul 1, 2025
In-situ defect count detection in post chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50