Inventor
NUMAKURA MASAHIRO
JP14 patents
⚠️ This page may combine multiple inventors who share the name “NUMAKURA MASAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS8055378B2Nov 8, 2011
Device for controlling processing system, method for controlling processing system and computer-readable storage medium stored processing program
TOKYO ELECTRON LTD540 citations98
US7455747B2Nov 25, 2008
Substrate processing apparatus, control method for the apparatus, and program for implementing the method
TOKYO ELECTRON LTD9 citations83
US7640072B2Dec 29, 2009
Substrate processing apparatus, control method for the apparatus, and program for implementing the method
TOKYO ELECTRON LTD6 citations72
US11735448B2Aug 22, 2023
Container, container partition plate, substrate processing system, and substrate transfer method
TOKYO ELECTRON LTD2 citations70
US7367769B2May 6, 2008
Semiconductor production system, cluster tool, control method of semiconductor production system and maintenance method of cluster tool
TOKYO ELECTRON LTD5 citations62
US8382910B2Feb 26, 2013
Cleaning method for substrate processing system, storage medium, and substrate processing system
TOKYO ELECTRON LTD2 citations61
US7738987B2Jun 15, 2010
Device and method for controlling substrate processing apparatus
TOKYO ELECTRON LTD5 citations61
US12444632B2Oct 14, 2025
System of processing substrate, transfer method, transfer program, and holder
TOKYO ELECTRON LTD0 citations49
US9824861B2Nov 21, 2017
Substrate processing apparatus, substrate processing method and recording medium recording substrate processing program
TOKYO ELECTRON LTD0 citations39