Inventor
ELLINGBOE ALBERT R
US16 patents
⚠️ This page may combine multiple inventors who share the name “ELLINGBOE ALBERT R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
8 patentsUS6949204B1Sep 27, 2005
Deformation reduction at the main chamber
LAM RES CORP415 citations99
US6823815B2Nov 30, 2004
Wafer area pressure control for plasma confinement
LAM RES CORP76 citations97
US6363882B1Apr 2, 2002
Lower electrode design for higher uniformity
LAM RES CORP57 citations96
US6492774B1Dec 10, 2002
Wafer area pressure control for plasma confinement
LAM RES CORP45 citations95
US7524397B2Apr 28, 2009
Lower electrode design for higher uniformity
LAM RES CORP9 citations84
US7470627B2Dec 30, 2008
Wafer area pressure control for plasma confinement
LAM RES CORP7 citations73
US6490536B1Dec 3, 2002
Integrated load simulator
LAM RES CORP12 citations73
US6712929B1Mar 30, 2004
Deformation reduction at the main chamber
LAM RES CORP3 citations63
UNIV CALIFORNIA
3 patentsUS5918140AJun 29, 1999
Deposition of dopant impurities and pulsed energy drive-in
UNIV CALIFORNIA69 citations96
USRE39988EJan 1, 2008
Deposition of dopant impurities and pulsed energy drive-in
UNIV CALIFORNIA18 citations92
US6436739B1Aug 20, 2002
Thick adherent dielectric films on plastic substrates and method for depositing same
UNIV CALIFORNIA22 citations92