Inventor
GIFFORD GEORGE G
US8 patents
Patents
8 patentsUS5200023AApr 6, 1993
Infrared thermographic method and apparatus for etch process monitoring and control
IBM181 citations98
US5347460ASep 13, 1994
Method and system employing optical emission spectroscopy for monitoring and controlling semiconductor fabrication
IBM119 citations96
US5378312AJan 3, 1995
Process for fabricating a semiconductor structure having sidewalls
IBM103 citations95
US5367139ANov 22, 1994
Methods and apparatus for contamination control in plasma processing
IBM60 citations94
US6057220AMay 2, 2000
Titanium polycide stabilization with a porous barrier
IBM36 citations92
US5546322AAug 13, 1996
Method and system for analyzing plasma data
IBM47 citations91
US5387777AFeb 7, 1995
Methods and apparatus for contamination control in plasma processing
IBM42 citations91
US5338702AAug 16, 1994
Method for fabricating tungsten local interconnections in high density CMOS
IBM37 citations89