Inventor
LEE SHERRY F
US8 patents
Patents
8 patentsUS6901564B2May 31, 2005
System and method for product yield prediction
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US6795952B1Sep 21, 2004
System and method for product yield prediction using device and process neighborhood characterization vehicle
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US6449749B1Sep 10, 2002
System and method for product yield prediction
PDF SOLUTIONS INC202 citations98
US7739065B1Jun 15, 2010
Inspection plan optimization based on layout attributes and process variance
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US7174521B2Feb 6, 2007
System and method for product yield prediction
PDF SOLUTIONS INC32 citations96
US7673262B2Mar 2, 2010
System and method for product yield prediction
PDF SOLUTIONS INC11 citations92
US7373625B2May 13, 2008
System and method for product yield prediction
PDF SOLUTIONS INC12 citations92
US7356800B2Apr 8, 2008
System and method for product yield prediction
PDF SOLUTIONS INC15 citations92