Inventor

HORIOKA KEJI

JP2 patents

Patents

2 patents

US6451703B1Sep 17, 2002

Magnetically enhanced plasma etch process using a heavy fluorocarbon etching gas

APPLIED MATERIALS INC96 citations96

US6613689B2Sep 2, 2003

Magnetically enhanced plasma oxide etch using hexafluorobutadiene

APPLIED MATERIALS INC38 citations91