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Inventor
HOFFMANN JAMES J
US
2 patents
⚠️ This page may combine multiple inventors who share the name “HOFFMANN JAMES J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VIRATEC THIN FILMS INC
1 patent
US5106474A
Apr 21, 1992
Anode structures for magnetron sputtering apparatus
VIRATEC THIN FILMS INC
62 citations
93
MICRON TECHNOLOGY INC
1 patent
US6682628B2
Jan 27, 2004
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies
MICRON TECHNOLOGY INC
4 citations
59