Inventor
JOSLYN MICHAEL JAMES
US2 patents
Patents
2 patentsUS6464824B1Oct 15, 2002
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies
MICRON TECHNOLOGY INC49 citations94
US6682628B2Jan 27, 2004
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies
MICRON TECHNOLOGY INC4 citations59