Inventor
GONZALES MARCELA
US3 patents
Patents
3 patentsUS7008737B2Mar 7, 2006
Gray scale x-ray mask
SANDIA NAT LAB11 citations81
US6749997B2Jun 15, 2004
Method for providing an arbitrary three-dimensional microstructure in silicon using an anisotropic deep etch
SANDIA NAT LAB10 citations70
US6680263B2Jan 20, 2004
Method for applying a photoresist layer to a substrate having a preexisting topology
SANDIA NAT LAB5 citations59