Inventor
SCAMAN MICHAEL EDWARD
US5 patents
Patents
5 patentsUS6005966ADec 21, 1999
Method and apparatus for multi-stream detection of high density metalization layers of multilayer structures having low contrast
IBM11 citations68
US6800864B2Oct 5, 2004
Method and structure for reducing effects of noise and resonance associated with an e-beam lithography tool
IBM6 citations57
US6781141B2Aug 24, 2004
Method and structure for detection and measurement of electrical and mechanical resonance associated with an E-beam lithography tool
IBM1 citations47
US7975246B2Jul 5, 2011
MEEF reduction by elongation of square shapes
IBM1 citations45
US6785615B2Aug 31, 2004
Method and structure for detection of electromechanical problems using variance statistics in an E-beam lithography device
IBM0 citations36