Inventor
VAN DEN BROEKE DOUG
US7 patents
⚠️ This page may combine multiple inventors who share the name “VAN DEN BROEKE DOUG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML MASKTOOLS BV
3 patentsUS6851103B2Feb 1, 2005
Method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography
ASML MASKTOOLS BV44 citations95
US7549140B2Jun 16, 2009
Method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography
ASML MASKTOOLS BV5 citations73
US7667216B2Feb 23, 2010
Method of achieving CD linearity control for full-chip CPL manufacturing
ASML MASKTOOLS BV1 citations49
PHOTRONICS INC
2 patentsUS6360134B1Mar 19, 2002
Method for creating and improved image on a photomask by negatively and positively overscanning the boundaries of an image pattern at inside corner locations
PHOTRONICS INC3 citations60
US6567719B2May 20, 2003
Method and apparatus for creating an improved image on a photomask by negatively and positively overscanning the boundaries of an image pattern at inside corner locations
PHOTRONICS INC1 citations49