Inventor

HOWE ROGER T

US67 patents

⚠️ This page may combine multiple inventors who share the name “HOWE ROGER T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HOWE ROGER T

UNIV CALIFORNIA

Temperature compensated oscillator including MEMS resonator for frequency control

Method of fabricating a sensor

Micromachined vibratory rate gyroscope

Microfabricated filter and shell constructed with a permeable membrane

Q-controlled microresonators and tunable electronic filters using such resonators

Microelectromechanical signal processors

Microfabricated filter and shell constructed with a permeable membrane

Q-controlled microresonators and tunable electronic filters using such resonators

Polycrystalline silicon germanium films for forming micro-electromechanical systems

Wafer-to-wafer transfer of microstructures using break-away tethers

Resonant accelerometer with flexural lever leverage system

Q-controlled microresonators and tunable electric filters using such resonators

Laterally driven resonant microstructures

Polycrystalline silicon-germanium films for micro-electromechanical systems application

Mixing, modulation and demodulation via electromechanical resonators

Microelectromechanical signal processor fabrication

Dual-mass micromachined vibratory rate gyroscope

Integrated circuit sensor

Microelectromechanical signal processors

Damascene process for use in fabricating semiconductor structures having micro/nano gaps

Method of applying a monolayer lubricant to micromachines

Method of drying passivated micromachines by dewetting from a liquid-based process

Selective etching of silicon carbide films

MASSACHUSETTS INST TECHNOLOGY

Resonant accelerometer

Method for fabricating side drive electrostatic micromotor

Electrostatic micromotor

Resonant accelerometer

Electrostatic micromotor

Digital technique for precise measurement of variable capacitance

Released film structures and method of measuring film properties

Turbulent shear force microsensor

SILICON CLOCKS INC

Microshells for multi-level vacuum cavities

Low stress thin film microshells

Thin film microshells incorporating a getter layer

MEMS structure having a compensated resonating member

MEMS structure having a stress inverter temperature-compensated resonating member

ANALOG DEVICES INC

Method for fabricating microstructures

Conductive plane beneath suspended microstructure

Conductive plane beneath suspended microstructure

Sensor with separate actuator and sense fingers

Apparatus to minimize stiction in micromachined structures

QUEVY EMMANUEL P

Planar microshells for vacuum encapsulated devices and damascene method of manufacture

Microshells with integrated getter layer

Planar microshells for vacuum encapsulated devices and damascene method of manufacture

SILICON LAB INC

Planar microshells for vacuum encapsulated devices and damascene method of manufacture

(unassigned)

Micro-machined angle-measuring gyroscope

SILICON LABS SC INC

MEMS coupler and method to form the same

SILICON LAB

MEMS structure having a stress inverter temperature-compensated resonator member

UNIV LELAND STANFORD JUNIOR

Electro-diffusion enhanced bio-molecule charge detection using electrostatic interaction

LIU YANG

Electro-diffusion enhanced bio-molecule charge detection using electrostatic interaction