P

Inventor

WU LIN-JUNG

TW9 patents
⚠️ This page may combine multiple inventors who share the name “WU LIN-JUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

6 patents
US9869018B2Jan 16, 2018

Solid precursor delivery method using liquid solvent for thin film deposition

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US10269560B2Apr 23, 2019

Atomic layer deposition method for manufacturing semiconductor structure

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations56
US10121653B2Nov 6, 2018

Bottom-up PEALD proces

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9530617B2Dec 27, 2016

In-situ charging neutralization

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations51
US9184045B2Nov 10, 2015

Bottom-up PEALD process

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10276397B2Apr 30, 2019

CVD metal seed layer

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50

LIN SU-HORNG

1 patent
US8623468B2Jan 7, 2014

Methods of fabricating metal hard masks

LIN SU-HORNG49 citations92

TAIWAN SEMICONDUCTOR MFG

1 patent
US9331168B2May 3, 2016

Semiconductor structure and manufacuturing method of the same

TAIWAN SEMICONDUCTOR MFG2 citations61

SEMILAB SEMICONDUCTOR PHYSICS LABORATORY CO LTD

1 patent
US10763179B2Sep 1, 2020

Non-contact method to monitor and quantify effective work function of metals

SEMILAB SEMICONDUCTOR PHYSICS LABORATORY CO LTD0 citations45