Inventor
HOUGHTON THOMAS F
US8 patents
⚠️ This page may combine multiple inventors who share the name “HOUGHTON THOMAS F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
5 patentsUS4721689AJan 26, 1988
Method for simultaneously forming an interconnection level and via studs
IBM45 citations85
US9589895B2Mar 7, 2017
Whole wafer edge seal
IBM2 citations68
US7910484B2Mar 22, 2011
Method for preventing backside defects in dielectric layers formed on semiconductor substrates
IBM1 citations50
US7179760B2Feb 20, 2007
Bilayer cap structure including HDP/bHDP films for conductive metallization and method of making same
IBM1 citations49
US8894800B2Nov 25, 2014
Polymeric edge seal for bonded substrates
IBM0 citations43