Inventor
REN LIANJUAN
CN4 patents
Patents
4 patentsUS11062913B2Jul 13, 2021
Etching process with in-situ formation of protective layer
YANGTZE MEMORY TECH CO LTD2 citations67
US11876016B2Jan 16, 2024
Methods for forming hole structure in semiconductor device
YANGTZE MEMORY TECH CO LTD0 citations57
US11817348B2Nov 14, 2023
Methods for forming hole structure in semiconductor device
YANGTZE MEMORY TECH CO LTD0 citations57
US11631592B2Apr 18, 2023
Etching process with in-situ formation of protective layer
YANGTZE MEMORY TECH CO LTD0 citations56