Inventor

KAGA TORU

JP42 patents

⚠️ This page may combine multiple inventors who share the name “KAGA TORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KAGA TORU

HITACHI LTD

Method of manufacturing a semiconductor device having silicon islands

Dynamic random access memory having trench capacitors and vertical transistors

Process for manufacturing vertical dynamic random access memories

Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same

Semiconductor integrated circuit device

Method for manufacturing a semiconductor device and a semiconductor memory device

Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same

Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same

Semiconductor memory device with recessed array region

Semiconductor integrated circuit device

Semiconductor memory device having stacked capacitor cells

Semiconductor device and semiconductor memory device

Semiconductor memory having trench capacitor formed with sheath electrode

Method of making a semiconductor memory device with recessed array region

Vertical dynamic random access memory

Dynamic random access memory having buried word lines

Semiconductor device

Semiconductor integrated circuit device including memory cells having a structure effective in suppression of leak current

Electrically erasable programmable RAM

Stacked semiconductor memory

Semiconductor memory device with recessed array region

Semiconductor integrated circuit device having a first wiring strip exposed through a connecting hole, a transition-metal film in the connecting hole and an aluminum wiring strip thereover, and a transition-metal nitride film between the aluminum wiring strip and the transition-metal film

Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same

Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same

Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same

Method of forming teos oxide and silicon nitride passivation layer on aluminum wiring

Semiconductor integrated circuit device process for fabricating the same and apparatus for fabricating the same

Semiconductor integrated circuit device

Semiconductor device having a low-resistivity planar wiring structure

Semiconductor memory device

Semiconductor memory device having stacked capacitors

Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same

Method of fabricating stacked capacitor cell memory devices

Semiconductor memory having stacked capacitor

Method for formation of insulation film on silicon buried in trench

Semiconductor integrated circuit device

Semiconductor memory device and method of manufacturing same

Semiconductor integrated circuit device

EBARA CORP

Electron beam apparatus and a device manufacturing method using the same apparatus

HITACHI VLSI ENG

Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same

RENESAS TECH CORP

Semiconductor memory device

KAGA TORU

Electron beam apparatus and sample observation method using the same