Inventor
SIM GEON BO
KR3 patents
Patents
3 patentsUS12082331B2Sep 3, 2024
Inductively coupled plasma reactor and wire structure for antenna coil of inductively coupled plasma reactor
LOT CES CO LTD0 citations57
US12327713B2Jun 10, 2025
Plasma reactor for inductively coupled plasma and method of assembling the same
LOT CES CO LTD0 citations53
US12062528B2Aug 13, 2024
Plasma reactor for inductively coupled plasma and method of assembling the same
LOT CES CO LTD0 citations53