Inventor
MINER GARY E
US12 patents
⚠️ This page may combine multiple inventors who share the name “MINER GARY E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS5660472AAug 26, 1997
Method and apparatus for measuring substrate temperatures
APPLIED MATERIALS INC181 citations98
US6037273AMar 14, 2000
Method and apparatus for insitu vapor generation
APPLIED MATERIALS INC139 citations97
US5755511AMay 26, 1998
Method and apparatus for measuring substrate temperatures
APPLIED MATERIALS INC107 citations97
US5848842ADec 15, 1998
Method of calibrating a temperature measurement system
APPLIED MATERIALS INC76 citations96
US6179466B1Jan 30, 2001
Method and apparatus for measuring substrate temperatures
APPLIED MATERIALS INC87 citations94
US6114258ASep 5, 2000
Method of oxidizing a substrate in the presence of nitride and oxynitride films
APPLIED MATERIALS INC95 citations94
US7317229B2Jan 8, 2008
Gate electrode structures and methods of manufacture
APPLIED MATERIALS INC19 citations92
US6410456B1Jun 25, 2002
Method and apparatus for insitu vapor generation
APPLIED MATERIALS INC25 citations92
US6159866ADec 12, 2000
Method for insitu vapor generation for forming an oxide on a substrate
APPLIED MATERIALS INC35 citations92
US7541650B2Jun 2, 2009
Gate electrode structures
APPLIED MATERIALS INC5 citations62
US7658973B2Feb 9, 2010
Tailoring nitrogen profile in silicon oxynitride using rapid thermal annealing with ammonia under ultra-low pressure
APPLIED MATERIALS INC1 citations51