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Inventor

GIBBONS JAMES F

US37 patents
⚠️ This page may combine multiple inventors who share the name “GIBBONS JAMES F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

13 patents
US5689614ANov 18, 1997

Rapid thermal heating apparatus and control therefor

APPLIED MATERIALS INC135 citations99
US5487127AJan 23, 1996

Rapid thermal heating apparatus and method utilizing plurality of light pipes

APPLIED MATERIALS INC116 citations99
US5155336AOct 13, 1992

Rapid thermal heating apparatus and method

APPLIED MATERIALS INC322 citations99
US5743643AApr 28, 1998

Rapid thermal heating apparatus and method

APPLIED MATERIALS INC59 citations97
US5317492AMay 31, 1994

Rapid thermal heating apparatus and method

APPLIED MATERIALS INC81 citations97
US6434327B1Aug 13, 2002

Rapid thermal heating apparatus and method including an infrared camera to measure substrate temperature

APPLIED MATERIALS INC57 citations96
US6122439ASep 19, 2000

Rapid thermal heating apparatus and method

APPLIED MATERIALS INC44 citations96
US6016383AJan 18, 2000

Rapid thermal heating apparatus and method including an infrared camera to measure substrate temperature

APPLIED MATERIALS INC66 citations96
US5840125ANov 24, 1998

Rapid thermal heating apparatus including a substrate support and an external drive to rotate the same

APPLIED MATERIALS INC38 citations96
US5790751AAug 4, 1998

Rapid thermal heating apparatus including a plurality of light pipes and a pyrometer for measuring substrate temperature

APPLIED MATERIALS INC44 citations96
US5767486AJun 16, 1998

Rapid thermal heating apparatus including a plurality of radiant energy sources and a source of processing gas

APPLIED MATERIALS INC27 citations96
US5708755AJan 13, 1998

Rapid thermal heating apparatus and method

APPLIED MATERIALS INC25 citations96
US5683173ANov 4, 1997

Cooling chamber for a rapid thermal heating apparatus

APPLIED MATERIALS INC49 citations96

SERA SOLAR CORP

8 patents

GIBBONS JAMES F

6 patents

HEWLETT PACKARD CO

3 patents

UNIV LELAND STANFORD JUNIOR

3 patents

UNIV STANFORD

2 patents

STANFORD LELAND JUNIOR UNIV TR

1 patent

GEN ELECTRIC

1 patent