Inventor
NISHITSUJI TOSHIHIKO
JP3 patents
Patents
3 patentsUS4975259ADec 4, 1990
Method of liquefying and condensing nitrogen trifluoride and a method of purifying nitrogen trifluoride
MITSUI TOATSU CHEMICALS26 citations89
US4960581AOct 2, 1990
Method for preparing gaseous metallic fluoride
MITSUI TOATSU CHEMICALS26 citations89
US4980144ADec 25, 1990
Process for purifying nitrogen trifluoride gas
MITSUI TOATSU CHEMICALS21 citations77