Inventor
IWANAGA NARUYUKI
JP6 patents
Patents
6 patentsUS4933158AJun 12, 1990
Method for purifying nitrogen trifluoride gas
MITSUI TOATSU CHEMICALS113 citations92
US4975259ADec 4, 1990
Method of liquefying and condensing nitrogen trifluoride and a method of purifying nitrogen trifluoride
MITSUI TOATSU CHEMICALS26 citations89
US4960581AOct 2, 1990
Method for preparing gaseous metallic fluoride
MITSUI TOATSU CHEMICALS26 citations89
US5084156AJan 28, 1992
Electrolytic cell
MITSUI TOATSU CHEMICALS20 citations77
US4980144ADec 25, 1990
Process for purifying nitrogen trifluoride gas
MITSUI TOATSU CHEMICALS21 citations77
US5085752AFeb 4, 1992
Electrolytic cell
MITSUI TOATSU CHEMICALS10 citations67