Inventor
OHASHI MITSUYA
JP11 patents
⚠️ This page may combine multiple inventors who share the name “OHASHI MITSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CENTRAL GLASS CO LTD
10 patentsUS6659111B1Dec 9, 2003
Cleaning gas and method for cleaning vacuum treatment apparatus by flowing the cleaning gas
CENTRAL GLASS CO LTD312 citations98
US6673262B1Jan 6, 2004
Gas for removing deposit and removal method using same
CENTRAL GLASS CO LTD14 citations92
US6147006ANov 14, 2000
Cleaning gas
CENTRAL GLASS CO LTD26 citations91
US7168436B2Jan 30, 2007
Gas for removing deposit and removal method using same
CENTRAL GLASS CO LTD11 citations83
US5234679AAug 10, 1993
Method of refining tungsten hexafluoride containing molybdenum hexafluoride as an impurity
CENTRAL GLASS CO LTD16 citations73
US7744769B2Jun 29, 2010
Gas for removing deposit and removal method using same
CENTRAL GLASS CO LTD6 citations72
US7355060B2Apr 8, 2008
Method for producing organosilane
CENTRAL GLASS CO LTD5 citations60
US12304833B2May 20, 2025
Tungsten hexafluoride manufacturing method, tungsten hexafluoride purification method, and tungsten hexafluoride
CENTRAL GLASS CO LTD0 citations58
US7973390B2Jul 5, 2011
Modifier for low dielectric constant film, and method for production thereof
CENTRAL GLASS CO LTD0 citations51
US7417167B2Aug 26, 2008
Process for producing carbonyl difluoride
CENTRAL GLASS CO LTD1 citations51