Inventor
DAO GIANG T
US22 patents
⚠️ This page may combine multiple inventors who share the name “DAO GIANG T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
21 patentsUS5635316AJun 3, 1997
Layout methodology, mask set, and patterning method for phase-shifting lithography
INTEL CORP106 citations99
US5620816AApr 15, 1997
Layout methodology, mask set, and patterning method for phase-shifting lithography
INTEL CORP109 citations99
US5595843AJan 21, 1997
Layout methodology, mask set, and patterning method for phase-shifting lithography
INTEL CORP100 citations99
US5881125AMar 9, 1999
Attenuated phase-shifted reticle using sub-resolution pattern
INTEL CORP61 citations96
US6715495B2Apr 6, 2004
Reduced particle contamination manufacturing and packaging for reticles
INTEL CORP37 citations95
US6279249B1Aug 28, 2001
Reduced particle contamination manufacturing and packaging for reticles
INTEL CORP44 citations95
US5446521AAug 29, 1995
Phase-shifted opaquing ring
INTEL CORP70 citations95
US5302477AApr 12, 1994
Inverted phase-shifted reticle
INTEL CORP195 citations95
US5384219AJan 24, 1995
Reticle with structurally identical inverted phase-shifted features
INTEL CORP56 citations93
US6763608B2Jul 20, 2004
Method of transporting a reticle
INTEL CORP23 citations92
US6732746B2May 11, 2004
Reduced particle contamination manufacturing and packaging for reticles
INTEL CORP13 citations92
US5789118AAug 4, 1998
Method and apparatus for precision determination of phase-shift in a phase-shifted reticle
INTEL CORP53 citations92
US5618643AApr 8, 1997
Embedded phase shifting mask with improved relative attenuated film transmission
INTEL CORP21 citations92
US5348826ASep 20, 1994
Reticle with structurally identical inverted phase-shifted features
INTEL CORP25 citations91
US5700602ADec 23, 1997
Method and apparatus for precision determination of phase-shift in a phase-shifted reticle
INTEL CORP29 citations89
US5633102AMay 27, 1997
Lithography using a new phase-shifting reticle
INTEL CORP25 citations89
US5354632AOct 11, 1994
Lithography using a phase-shifting reticle with reduced transmittance
INTEL CORP43 citations89
US5300379AApr 5, 1994
Method of fabrication of inverted phase-shifted reticle
INTEL CORP41 citations88
US5688409ANov 18, 1997
Processes for fabricating device layers with ultrafine features
INTEL CORP14 citations71
US6569582B2May 27, 2003
Hinged pellicles and methods of use
INTEL CORP5 citations58
US7368020B2May 6, 2008
Reduced particle contamination manufacturing and packaging for reticles
INTEL CORP0 citations51