Inventor
TORAGUCHI MAKOTO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “TORAGUCHI MAKOTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJI ELECTRIC CO LTD
4 patentsUS6277248B1Aug 21, 2001
Ozone production facilities and method of their operation
FUJI ELECTRIC CO LTD61 citations94
US5160152ANov 3, 1992
Electrostatic chuck
FUJI ELECTRIC CO LTD67 citations92
US6027701AFeb 22, 2000
Ozone generator
FUJI ELECTRIC CO LTD27 citations87
US6027700AFeb 22, 2000
Ozone production facilities and method of their operation
FUJI ELECTRIC CO LTD12 citations71
TOKYO ELECTRON LTD
3 patentsUS6161498ADec 19, 2000
Plasma processing device and a method of plasma process
TOKYO ELECTRON LTD40 citations92
US5948485ASep 7, 1999
Plasma deposition method and an apparatus therefor
TOKYO ELECTRON LTD27 citations90
US6284674B1Sep 4, 2001
Plasma processing device and a method of plasma process
TOKYO ELECTRON LTD8 citations73